About: http://webisa.webdatacommons.org/247664127

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1B illustrates a condition in which silicon and other dusts are transmitted to an edge side of the view of a wafer-cleaning part of a conventional polishing apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es