About: http://webisa.webdatacommons.org/247696035

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 16 is a manufacturing flow of a micro-device (e.g., a semiconductor chip such as IC or LSI, a liquid crystal panel, a CCD, a thin-film magnetic head or micro machine).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com