About: http://webisa.webdatacommons.org/247878099

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2A is a schematic diagram of the prior art device illustrated in FIG. 1 (depicting the right half of a symmetric system) in a wafer-below/showerhead-above arrangement.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com