About: http://webisa.webdatacommons.org/247918339

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Within the terms of the present invention, the plasma generation may be generated by any means such as RF (radiofrequency), MW (microwave) or DC (direct current) technique.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au