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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Similarly, other materials, such as tungsten, may be used for the layer 26 if they provide good selectivity between the silicon and the silicon dioxide and silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com