About: http://webisa.webdatacommons.org/247933422

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2A is a flowchart illustrating operations of a method which may be used to measure the shape and thickness of a wafer with high slope areas according to an embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com