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http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 6A to 6D are a cross-sectional view for explaining a stepwise growth mode of a nitride semiconductor grown on a patterned substrate according to the embodiment shown in FIG. 2;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com