About: http://webisa.webdatacommons.org/248465004

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is a further object of the invention to provide an improved method for deposition by sputtering of compounds including oxides, nitrides, fluorides, sulfides, chlorides, borides and mixtures thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com