About: http://webisa.webdatacommons.org/248556024

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a flow chart of a process control computer program product used in conjunction with the exemplary CVD plasma reactor of FIG. 2;
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca