About: http://webisa.webdatacommons.org/248579197

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5B is a simplified cross section of a gas ring that may be used in conjunction with the exemplary CVD processing chamber of FIG. 5A.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca