About: http://webisa.webdatacommons.org/248633036

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a graph showing typical isoelectric behavior in terms of zeta potential of particles in a chemical mechanical planarization or polishing (CMP) slurry in accordance with one or more embodiments of the invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com