About: http://webisa.webdatacommons.org/248796548

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a perspective, partially exploded view of a wafer insertion apparatus in accordance with a further embodiment of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es