About: http://webisa.webdatacommons.org/248851724

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a process flow chart for separately salicidating the wordlines and periphery transistor junctions, according to one embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com