About: http://webisa.webdatacommons.org/249239091

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, when the support substrate 1 is of quartz that consists mainly of silicon oxide, there can be used silicon oxide as the ground film 24.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com