About: http://webisa.webdatacommons.org/249513841

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	More particularly, it also becomes clear to form a nitride film, when they are performed in an atmosphere including nitrogen of ammonia and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com