About: http://webisa.webdatacommons.org/249799282

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 17 is a graph illustrating how a silicon etching rate and a deposition rate of the oxide-based film vary as the ratio R of the gas varies.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com