About: http://webisa.webdatacommons.org/249963221

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Silicon or other semiconductor material is preferred for substrate 102 although other materials such as ceramics may be used as well.Devices in accordance with the invention may be fabricated either singly or many at one time.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com