About: http://webisa.webdatacommons.org/250447877

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is to be understood that chuck types other than electrostatic chucks can benefit from the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de