About: http://webisa.webdatacommons.org/250474111

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is important to note that Si3 N4 or "silicon nitride as referenced herein may contain impurities such as oxygen due to environmental conditions under which the deposition is effected.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com