About: http://webisa.webdatacommons.org/250689706

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to the fourth embodiment of the present invention, by applying the structure as described above, it is possible to obtain the same types of effects as those of the first embodiment by use of the Levenson type phase shift mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au