| http://www.w3.org/ns/prov#value | - Further, the base 903 is moved straight in an angular direction (on a face including a plane including the linear laser beam) which is slightly deviated from a direction orthogonal to the line direction of the linear laser beam by a moving mechanism 1007 and laser beam is irradiated to an upper face of the processed substrate 902 while being scanned.
|
