About: http://webisa.webdatacommons.org/250936337

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, for aligning the substrate, ?? correction is needed in addition to two axes of X and Y, so there is a need of a complicated stage enabling precise operation for fine adjustment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com