About: http://webisa.webdatacommons.org/251077396

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Optical system 34 can include mirrors, lenses, and other apparatus necessary to direct image 34 to wafer 12.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com