About: http://webisa.webdatacommons.org/251183371

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, there is a problem, that the rubbed alignment layers are damaged by the subsequent photolithographic operations, and the quality of the alignment layers deteriorate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au