| http://www.w3.org/ns/prov#value | - layers is/are formed of a film (also referred to as an inorganic film) containing an inorganic material such as silicon, an oxide of silicon or a nitride of silicon, or a film (also referred to as an organic film) containing an organic material such as an organic resin by the known method (such as the plasma CVD method and sputtering).
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