About: http://webisa.webdatacommons.org/251572246

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The thermal oxidation may reduce abrasions and other damage to the top and sides of the trenches 312 and the inner surfaces of the vacant spaces 314 caused by the etching steps.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com