| http://www.w3.org/ns/prov#value | - (1) Configuration including at least an n or p layer of 1???1014/cm3 or less, or an i layer as a middle layer between the n layer 4 and the p++ layer 2 in FIG. 1 (2) Configuration including an n layer of 2???1014/cm3 or less and a p layer of 2???1014/cm3 or less in the middle layer
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