| http://www.w3.org/ns/prov#value | - When the barrier film 105 is exposed, when use is made of a material such as Ta, Ti, TaN, or TiN, the electrical resistance is larger in comparison with copper, therefore the current value monitored by the ammeter 62 starts to be lowered from the point of time indicated by P3 when the exposure of the barrier film 105 in FIG. 25 is commenced.
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