About: http://webisa.webdatacommons.org/252067865

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1 wherein the semiconductor substrate is a layered substrate comprising a first layer on which has been successively formed a second layer and a third layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com