About: http://webisa.webdatacommons.org/252071819

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The preferred dielectric layer is a nitride layer which can be formed using various known methods such as CVD deposition, rapid thermal nitridation (RTN) processing or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com