About: http://webisa.webdatacommons.org/252253346

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The multilevel interconnections that lie at the heart of the technology require planarization of high aspect ratio apertures, including contacts, vias, lines, or other features.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com