About: http://webisa.webdatacommons.org/252394551

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the deposition pressure is more than 133.322 Pa, powder may be formed other than a film, or deposition defects including a hemisphere scum in the film may occur frequently.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com