About: http://webisa.webdatacommons.org/252402606

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The seed layer may be deposited by sputtering, but other methods such as CVD may also be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca