About: http://webisa.webdatacommons.org/252494035

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This problem is particularly prevalent in applications where thick photoresist is used and the device design includes rapid changes within short areas, as illustrated in FIG. 7.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com