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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When using materials other than silicon for forming the polycrystalline film 31, the growth rate of the film 31 must be similarly controlled so that its thickness is limited to
http://www.w3.org/ns/prov#wasQuotedFrom	google.com