About: http://webisa.webdatacommons.org/252542168

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The lithography system of claim 19, wherein said at least one chuck is an electrostatic chuck.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com