About: http://webisa.webdatacommons.org/252542487

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the antireflective layer is formed of a chromium compound, the thickness is determined according to conditions including the wavelength of light used for inspecting a mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com