About: http://webisa.webdatacommons.org/252645965

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Projection exposure apparatuses are used in manufacturing electronic devices such as semiconductor devices and liquid crystal displays by using photolithography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com