About: http://webisa.webdatacommons.org/252902693

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the second insulating layer are removed from the surface except for a portion of the second insulating layer deposited on the sidewall of the contact hole.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com