PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Alternatively, an organic insulating material such as polyimide or acrylic may be formed, and its surface may be leveled. [0158] Next, contact holes are formed in order to reach the impurity regions of each semiconductor film from the surface of the fourth insulating film 712, and wirings are formed using a material such as Al, Ti, or Ta.
http://www.w3.org/ns/prov#wasQuotedFrom
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