About: http://webisa.webdatacommons.org/253640811

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A semiconductor image pickup device according to claim 6, wherein said first and third insulating films are silicon oxide films and said second insulating film is a silicon nitride film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es