| http://www.w3.org/ns/prov#value | - iring; (d) removing said first insulating film at a portion thereof corresponding to a contact region of said first wiring thereby forming a contact hole; (e) successively forming a barrier layer and a conductive film on said second insulating film including said contact hole and the inside of the said groove for wiring; (f) removing said barrier layer and said conductive film from outside of said
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