About: http://webisa.webdatacommons.org/254106791

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, increasing the concentration of one or more etchants such as Freon 134a, CHF3, H2, which are known to lead to increased polymer formation may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com