About: http://webisa.webdatacommons.org/254306076

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, where the microelectronic substrate includes a metal such as titanium, the polishing pad can include a compound of titanium, such as titanium dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au