| http://www.w3.org/ns/prov#value | - For example, an Mn film may be formed by using only Mn(DPM)2 as a material for the metalorganic film and reducing and dissolving Mn(DPM)2 on the substrate with the reaction chamber kept in the supercritical or subcritical state in the presence of a reducing material such as carbon dioxide or a mixture of carbon dioxide and NH3.
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