About: http://webisa.webdatacommons.org/254614317

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such a system is known as a low pressure, static loaded wafer polishing system.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com