PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Such properties depend on the manufacture and process conditions, including the type of substrate, deposition temperature, doping, annealing and chemical etching.
http://www.w3.org/ns/prov#wasQuotedFrom
  • eetimes.com