About: http://webisa.webdatacommons.org/254728483

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Layer 52 can be other substrate material as known in the art, including but not limited to, silicon (Si), gallium arsenide (GaAs), silicon carbide (SiC), or indium phosphide (InP).
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk