About: http://webisa.webdatacommons.org/254812996

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Each guide 46 may be include a slot such as V or U shaped slot in which the wafer's edge is held.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com