About: http://webisa.webdatacommons.org/254977098

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Barrier layer 13 can be formed using a variety of techniques such as sputtering, evaporation, chemical vapor deposition (CVD), or plasma enhanced chemical vapor deposition (PECVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com